Optical fiber Fabry-Perot interferometer cavity fabricated by femtosecond laser micromachining and fusion splicing for refractive index sensing

摘要

We demonstrate a fiber in-line Fabry-Perot interferometer cavity sensor for refractive index measurement. The interferometer cavity is formed by drilling a micro-hole at the cleaved fiber end facet, followed by fusion splicing. A micro-channel is inscribed by femtosecond laser micromachining to vertically cross the cavity to allow liquid to flow in. The refractive index sensitivity obtained is ~994 nm/RIU (refractive index unit). Such a device is simple in configuration, easy for fabrication and reliable in operation due to extremely low temperature cross sensitivity of ~4.8 × 10⁻⁶ RIU/°C.